PECVD of amorphous hydrogenated oxygenated nitrogenated carbon films
1998 ◽
Vol 36
(11)
◽
pp. 1881-1888
◽
1998 ◽
Vol 16
(3)
◽
pp. 1907-1911
◽
Keyword(s):
Keyword(s):
2000 ◽
Vol 18
(5)
◽
pp. 2466
◽
2001 ◽
Vol 10
(11)
◽
pp. 1962-1967
◽
2002 ◽
Vol 11
(3-6)
◽
pp. 1227-1233
◽